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LAM/NOVELLUS Heaters

​Novellus Vector Process Pedestal  

Type
TMax
Process
P/N
12 '' Novellus Vector Process Pedestal
~400 °C
PE-CVD
novellus vector pedestal heater
pedestal heater
pedestal heater

C2 Altus Pedestal 

Type
T Max
Process
P/N
C2 Altus Pedestal D3
~400 °C
CVD-W
1015-2001
C2 Altus Pedestal
~400 °C
CVD-W
1010-1001

Heater Block

Type
T Max
Process
P/N
Heater Block 8'
~400 °C
PE-CVD
3030-2303, 3030-2003, 3030-2103
heater block
heater block
preheat heater

PreHeat

Type
T Max
Process
P/N
CIP PreHeat HTR
~400 °C
PE-TEOS
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