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"Better Parts, Better System"
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LAM/NOVELLUS Heaters
Novellus Vector Process Pedestal
Type | TMax | Process | P/N |
---|---|---|---|
12 '' Novellus Vector Process Pedestal | ~400 °C | PE-CVD |
C2 Altus Pedestal
Type | T Max | Process | P/N |
---|---|---|---|
C2 Altus Pedestal D3 | ~400 °C | CVD-W | 1015-2001 |
C2 Altus Pedestal | ~400 °C | CVD-W | 1010-1001 |
Heater Block
Type | T Max | Process | P/N |
---|---|---|---|
Heater Block 8' | ~400 °C | PE-CVD | 3030-2303, 3030-2003, 3030-2103 |
PreHeat
Type | T Max | Process | P/N |
---|---|---|---|
CIP PreHeat HTR | ~400 °C | PE-TEOS |
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