top of page

AMAT Heaters

Bellow Heater
​波纹管加热盘

Type
T Max
Process
P/N
Bellow Heater 8''
~500 °C
PVD
Inquire For Specific P/N, Customizable

客制化可

加热盘
加热盘
加热盘，heater
加热盘
加热盘
加热盘, heater
加热盘, heater

WxZ HEATER

Type
T Max
Process
P/N
6'' WxZ CPR
~500 °C
CVD-W
0010-04541
8'' WxZ CPR
~500 °C
CVD-W
0010-04542
加热盘, heater
加热盘, heater

DxZ HEATER

Type
T Max
Process
P/N
8'' DxZ High Temp
~500 °C
PE-CVD
0010-05257
6'' DxZ Low Temp
~500 °C
PE-CVD
0010-05256
8'' DxZ Low Temp
~500 °C
PE-CVD
0010-05254
加热盘, heater

TxZ HEATER

Type
T Max
Process
P/N
8'' TxZ 3 Pin
~470 °C
CVD-Tin
6'' TxZ 4 Pin
~470 °C
CVD-Tin
0010-11996
8'' TxZ 4 Pin
~470 °C
CVD-Tin
0010-11997
加热盘
加热盘

DEGAS HEATER

Type
T Max
Process
P/N
Degas Heater
0010-24057
bottom of page